美国Silicon Microstructures INC.开发了一系列价位低、线性度在0.3%到0.05%范围内的硅微结构压阻式传感器，满量程为0.15psi(1KPa)、0.3psi(2KPa)、0.8psi(5KPa)、1.5psi(10KPa)、3 psi(20KPa)、***满量程为0.15psi(1KPa)，被列为***压力测量范围。

SM5651-008-D-3-SR

HIGHLIGHTS-> Low pressures for sensitive applicATIons-> Constant current driven-> Dual inline package (DIP)-> Fully temperature compensated and calibrated-> Primary pressure port on back-side of sensor die, protectingside of sensor-> Span calibration using integrated resistor and external opamps

TYPICAL APPLICATIONS-> Medical equipment-> Respiration-> HVAC-> Level detection-> Flow measurement-> Industrial control

TECHNICAL FEATURES-> 0.15, 0.3, 1.5 PSI/ 1.0, 2.1, 10.3 kPa-> Easy-to-use dual inline package (DIP)-> Zero offset calibration-> High-performance, stable packaged silicon chip-> Wide 0-60C compensated temperature range

DEscriptION The SM5600 Series of OEM pressure sensors are laser trimmed, temperature-compensated, low-pressure sensors in dual in-line packages for printed circuit board mounting. These sensors offer improved performance as well as the option for constant current excitation. With the ability to detect pressure ranges as low as 0.15 PSI full scale, the SM5651 is ideal for a pplications requiring extreme sensitivity, from respiration to air filter obstructions.

The SM5600 Series pressure sensors are constructed by attaching a highly sta ble piezoresistive pressu re sensor chip to aceramic substrate. Thick film resistors on the ceramic are laser trimmed during manufacturing to provide zero offset calibration,temperature compensation for zero offset, and temperature compensation for sensitivity. In the SM5651 an additional resistor is trimmed to normalize the output of an externaldifferential amplifier to provide span calibration when the sensor is driven by a constant current supply. Various pressu re port configu rations a re availa ble for flexibilityin matching this product to specific applications.

ABSOLUTE MAXIMUM RATING TABLE FOR SM5651

All parameters are specifed with excitation current = 1.5mA at room temperature, unless otherwise noted.

OPERATING CHARACTERISTICS FOR SM5651 - SPECIFICATIonSAll parameters are specifed with excitation current = 1.5mA at room temperature, unless otherwise noted.

NOTES:(a)Positive Pressu re is defined as entry on the bottom side of the die; gain, during factory calibration, is set using negative pressure.(b) Values given for top side.(c)Measured over a temperature range of 22C to 58C.(d) Tested on a sample basis.(e)Sensitivity Matching is measured by the part-to-part matching of span.(f) Clean, dry gas compatible with wetted materials. Wetted materials include Pyrex glass, silicon, alumina ceramic, epoxy, RTV, gold, aluminum, and nickel.

All dimensions are shown in millimeters

NOTES:. Do not connect to NC pins..External connections to NC pins will cause pa rt malfunction.. Tolerance on all dimensions +0.13 mm unless otherwise specified.. [B] is tube connected to bottom side of sensor die.. [T] is tube connected to top side of sensor die.. Tube [B] is used for positive differential pressure.

Pin Configuration. Pins opposite direction of tube

Tube LengthL: Long (12.45 mm + 0.10 mm)S: Short (8.25 mm + 0.10 mm)

Pressure TypeD: Differential (2 Tubes)

Typical Circuit Configuration for SM5651

Ordering Information

SM5651-008-D-3-SR
SM5651-001-G-3-LR
SM5651-003-D-3-SR
SM5651-001-D-3-SR
SM5651-008-G-3-SR
SM5651-008-D-3-LR
SM5651-015-G-3-LR
SM5651-003-D-3-LR
SM5651-003-G-3-SR
SM5651-015-D-3-LR
SM5651-015-D-3-SR
SM5651-003-G-3-LR
SM5651-008-G-3-LR
SM5651-015-G-3-SR
SM5651-001-D-3-LR
SM5651-001-G-3-SR
SM5651-003-D-3-NR
SM5651-030-D-3-SR
SM5652-003-G-3-LR
SM5652-008-G-3-LR
SM5652-015-D-3-SR
SM5652-001-G-3-LR
SM5652-008-D-3-SR
SM5652-001-D-3-SR
SM5652-008-G-3-SR
SM5652-003-D-3-SR
SM5652-008-D-3-LR
SM5652-003-G-3-SR
SM5652-015-D-3-LR
SM5652-015-G-3-LR
SM5652-003-D-3-LR
SM5652-015-G-3-SR
SM5652-001-G-3-SR
SM5652-001-D-3-LR
SM5652-001-D-3-NR
SM5652-001-D-3-LHR
SM5652-015-D-3-NR
SM5652-002-G-3-SR
SM5652-008-D-3-NR
SM5102-005-GX
SM5102-015-GX
SM5102-015-AX
SM5102-030-GX
SM5102-030-AX
SM5102-060-GX
SM5102-060-AX
SM5102-100-GX
SM5102-100-AX
SM5103-003-GX
SM5103-008-GX
SM5103-015-GX
SM5108C-015-AX
SM5108C-030-AX
SM5108C-060-AX
SM5108C-150-AX
SM5420C-015-A-H-T
SM5420C-015-A-P-T
SM5420C-030-A-H-T
SM5420C-015-A-P-T
SM5420C-060-A-H-T
SM5420C-060-A-P-T
SM5420C-100-A-H-T
SM5420C-100-A-H-T
SM5470-001-G-C-TR
SM5470-001-G-B
SM5470-003-D-C
SM5470-001-D-B
SM5470-001-D-C-TR
SM5470-003-G-B-TR
SM5470-001-G-C
SM5470-008-D-B
SM5470-001-D-B-TR
SM5470-003-D-C-TR
SM5470-003-D-B-TR
SM5470-003-G-B
SM5470-001-G-B-TR
SM5470-003-D-B
SM5470-008-D-B-TR
SM5470-030-G-C
SM5470-030-D-C
SM5470-015-G-B
SM5470-008-G-C
SM5430-015-G-B
SM5430-030-D-B
SM5611-015-G-3-LR
SM5611-060-D-3-SR
SM5612-015-A-5-NR
SM5612-060-D-3-NR
SM5812-005-A-3-LR
SM5812-005-D-3-LR
SM5812-005-S-3-LR
SM5812-015-D-3-LR
SM5812-015-G-3-LR
SM5812-030-D-3-LR
SM5812-030-G-3-LR
SM5812-030-G-3-SR
SM5812-060-A-3-LR
SM5812-060-G-3-LR
SM5812-100-G-3-LR
SM5812-100-G-3-SR
SM5812-100-S-3-LR
SM5822-015-D-B
SM5822-015-A-B-TR
SM5822-015-S-B-TR
SM5822-060-A-B-TR
SM5822-015-S-B
SM5822-015-D-B-TR
SM5822-060-A-B
SM5822-015-A-B
SM5822-100-D-B
SM5822-100-G-B
SM5822-015-G-B
SM5822-100-S-B
SM5852-001-D-3-LR
SM5852-001-S-3-LR
SM5852-003-D-3-LR
SM5852-003-S-3-LR
SM5852-004-S-3-SR
SM5852-015-G-3-LR
SM5882-006-D-B
SM5882-006-G-B
SM5882-006-S-B
SM5882-015-D-B
SM5882-015-G-B
SM5882-015-S-B
SM6842-015-A-C-S
SM9221-030-A-D
SM9221-060-A-D
SM9221-150-A-D
SM9221-300-A-D
SM9541-010C-S-C-3-S
SM9541-010C-D-C-3-S
SM9541-020C-S-C-3-S
SM9541-020C-D-C-3-S
SM9541-040C-S-C-3-S
SM9541-040C-D-C-3-S
SM9541-100C-S-C-3-S
SM9541-100C-D-C-3-S
SM9543-005M-D-C-3-S
SM5420-015-A-H-T
SM5420-030-A-H-T
SM5420-060-A-H-T
SM5420-100-A-H-T
SM5882-006-D-B
SM5882-006-S-B
SM5882-015-D-B
SM5882-015-S-B
SM5420C-015-A-H-T
SM5420C-015-A-P-T
SM5420C-030-A-H-T
SM5420C-030-A-P-T
SM5420C-060-A-H-T
SM5420C-060-A-P-T
SM5420C-100-A-H-T
SM5420C-100-A-P-T
SM5470-001-D-B
SM5470-001-G-B
SM5470-001-D-C
SM5470-003-D-B
SM5651-001-D-3-LR
SM5651-001-D-3-SR
SM5651-003-D-3-SR
SM5651-015-D-3-SR
SM5652-001-D-3-LR
SM5652-001-D-3-SR
SM5652-003-D-3-LR
SM5652-003-D-3-SR
SM5652-003-G-3-SR
SM5652-008-D-3-SR
SM5652-015-D-3-LR
SM5652-015-D-3-SR
SM5852-015W-D-3-LR
SM5852-001-D-3-LR
SM5852-001-S-3-LR
SM5852-003-D-3-LR
SM5852-008-G-3-SR
SM5852-003-S-3-LR
SM5852-004-S-3-SR
SM5852-015-G-3-LR
SM5822-015-A-B
SM5822-015-D-B
SM5822-015-G-B
SM5822-015-S-B
SM5822-060-A-B
SM5102-005-GX
SM5102-015-GX
SM5102-015-AX
SM5102-030-GX
SM5102-030-AX
SM5102-060-GX
SM5102-060-AX
SM5102-100-GX
SM5102-100-AX
SM5103-003-GX
SM5103-008-GX
SM5103-015-GX
SM5106-015-AX
SM5106-030-AX
SM5106-060-AX
SM5106-150-AX
SM5108C-015-AX
SM5108C-030-AX
SM5108C-060-AX
SM5108C-150-AX
SM9221-150-A-D
SM9221-300-A-D
SM2120-005-G-D
SM5470-003-D-C
SM5470-008-D-B
SM5470-008-D-C
SM5420C-015-A-H-T
SM5420C-015-A-P-T
SM5420C-030-A-H-T
SM5420C-030-A-P-T
SM5420C-060-A-H-T
SM5420C-060-A-P-T
SM5420C-100-A-H-T
SM5420C-100-A-P-T
SM5852-001-D-3-LR
SM5852-003-D-3-LR
SM5852-003-S-3-LR
SM5852-004-S-3-LR
SM5852-008-G-3-SR
SM5852-015-G-3-LR
SM5882-006-D-B
SM5882-006-S-B
SM5882-015-D-B
SM5882-015-S-B
SM5103-015-GX
SM5102-005-GX
SM5470-001-D-B
SM5470-001-G-B
SM5470-003-D-B
SM5470-008-D-B
SM5420C-015-A-H-T
SM5420C-015-A-H-T
SM5420C-015-A-P-T
SM542C-030-A-H-T
SM5420C-030-A-P-T
SM5420C-060-A-H-T
SM5420C-060-A-P-T
SM5420C-100-A-H-T
SM5420C-100-A-P-T
SM6841-015-A-H-T
SM6841-030-A-H-T
SM6841-060-A-H-T
SM6841-100-A-H-T
SM6841-015-A-H-S
SM6841-030-A-H-S
SM6841-060-A-H-S
SM6841-100-A-H-S
SM9541-010C-S-C-3-S
SM9541-010C-D-C-3-S
SM9541-020C-S-C-3-S
SM9541-020C-D-C-3-S
SM9541-040C-S-C-3-S
SM9541-040C-D-C-3-S
SM9541-100C-S-C-3-S
SM9541-100C-D-C-3-S
SM9221-030-A-D
SM9221-060-A-D
SM6842-015-A-C-S

SM5651-008-D-3-SR
SM5651-001-G-3-LR
SM5651-003-D-3-SR
SM5651-001-D-3-SR
SM5651-008-G-3-SR
SM5651-008-D-3-LR
SM5651-015-G-3-LR
SM5651-003-D-3-LR
SM5651-003-G-3-SR
SM5651-015-D-3-LR
SM5651-015-D-3-SR
SM5651-003-G-3-LR
SM5651-008-G-3-LR
SM5651-015-G-3-SR
SM5651-001-D-3-LR
SM5651-001-G-3-SR
SM5651-003-D-3-NR
SM5651-030-D-3-SR